Issue
Korean Journal of Chemical Engineering,
Vol.21, No.1, 262-266, 2004
Nucleation of Diamond over Nanotube Coated Si Substrate Using Hot Filament Chemical Vapor Deposition (CVD) System
We studied the use of carbon nanotubes as a seeding layer for the nucleation of diamond on Si (100) substrate by using a hot filament chemical vapor deposition (HFCVD) system. Prior to deposition, substrates were seeded with multi-wall carbon nanotube (MWCNT) powder which was prepared separately. MWCNTs were used as nucleation precursors. The diamond grains grew essentially over the nanotubes with a higher growth density in comparison with the un-seeded substrates. The scanning electron microscopy (SEM) image of surface morphology shows crystallites of cauliflower shaped grains. The micro Raman spectroscopic results show a sharp peak at 1,332 cm-1 corresponding to diamond phase. X-ray photoelectron spectroscopic study show the presence of carbon (C1s) phase.
[References]
  1. Baranauskas V, Ceragioli HJ, Peterlevitz AC, Tosin MC, Durrant SF, Thin Solid Films, 377-378, 303, 2000
  2. Van Chiem C, Kim JH, Shin HS, Seo JM, J. Vac. Sci. Technol. A, 20(1), 202, 2002
  3. Chiem CV, Seo HK, Ansari SG, Kim GS, Seo JM, Shin HS, Korean J. Chem. Eng., 20(6), 1154, 2003
  4. Crist BV, "Handbook of Monochromatic XPS Spectra, The Elements of Native Oxides," John Wiley & Sons Ltd., New York, 45, 2000
  5. Kibria AKMF, Mo YH, Nahm KS, Catal. Lett., 71(3-4), 229, 2001
  6. Gruen DM, Liu S, Krauss AR, Pan X, J. Appl. Phys., 75(3), 1758, 1994
  7. Hou YQ, Zhuang DM, Zhang G, Wu MS, Liu JJ, Appl. Surf. Sci., 185, 303, 2002
  8. Lawrence SP, Kania DR, "Diamond: Electronic Properties and Applications," Kluwer Academic Publisher, 1995
  9. Meilunas RJ, Chang RPH, Liu S, Kappes MM, Appl. Phys. Lett., 59(26), 3461, 1991
  10. Terrones H, Mackay AL, Carbon, 30(8), 1251, 1992
  11. Yugo S, Semoto K, Nakamura N, Kimura T, Nakai H, Hashimoto M, Dia. Relat Mat., 6, 1047, 1997