Print: | ISSN 0256-1115 |
Online: | ISSN 1975-7220 |
Korean Journal of Chemical Engineering,
Vol.31, No.10, 1892-1897, 2014 Electrical and optical characteristics of Ar plasma generated by low-frequency (60Hz) power source
The optical and electrical properties of Ar plasma, ignited using low-frequency (LF, 60 Hz) power source, were investigated. The plasma resistance, electron temperature, and density were found to be ~10^(2) Ω, ~3 eV and ~10^(8) cm-3, respectively. The plasma parameters are strongly dependent on Ar pressure and discharge current, and the results of optical emission analysis showed similar tendency to the probe measurements. The properties of Ar plasma are similar
to DC-pulsed discharge, and the polarity of AC power can be possible of depositions and modifications on both conductive and insulating materials, unlike DC discharge. The a-C films, which are deposited using Ar-diluted CH4 plasma, showed a smooth surface, high transmittance (>80%), high sp3 concentration (~40%) and wide optical band-gap (3.55 eV). Consequently, the LF power source was found to be a very simple, convenient and inexpensive tool to generate
plasmas for various applications.
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