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Total 55 articles [ 키워드: Thin Film ] |
No. |
Article |
51 |
Korean Journal of Chemical Engineering, 15 (6), pp.652-657 (1998) A Study of Deposition Rate and characterization of BN Thin Films Prepared by CVD Jin YG, Lee SY, Nam YW, et al. |
52 |
Korean Journal of Chemical Engineering, 15 (3), pp.243-245 (1998) Crystalline Structure of YSZ Thin Films Deposited on Si((111) Substrate by Chemical Vapor Deposition Hwang SC, Lee HG, Shin HS |
53 |
Korean Journal of Chemical Engineering, 14 (2), pp.136-140 (1997) METALORGANIC CHEMICAL VAPOR DEPOSITION OF FERROELECTRIC Pb(ZrXTi1-X)O3 THIN FILMS Chung CW, Kim D |
54 |
Korean Journal of Chemical Engineering, 13 (5), pp.473-477 (1996) PREPARATION AND CHARACTERIZATION OF TiO2 THIN FILMS BY PECVD ON Si SUBSTRATE Lee IS, Kim JW, Youn CJ, et al. |
55 |
Korean Journal of Chemical Engineering, 12 (1), pp.1-11 (1995) CHEMICAL VAPOR DEPOSITION OF ALUMINUM FOR ULSI APPLICATIONS Rhee SW |
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