Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N₂ flow containing vapors of water, acetone, and benzene, respectively. In creased for benzene, compared to that of the bare delay line.