The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.