Rapid particle growth in the silane plasma reactor by coagulation between 2-sized particles was analyzed for various process conditions. The particle coagulation rate was calculated considering the effects of particle charge distribution based on the Gaussian distribution function. The large size particles are charged more negatively than the small size particles. Some fractions of small size particles are in neutral state or charged positively, depending on the plasma conditions. The small size particle concentration increases at first and decreases later and reaches the steady state by the balance of generation rate and coagulation rate. The large size particles grow with discharge time by coagulation with small size particles and their size reaches the steady state, while the large size particle concentration increases with discharge time by faster generation rate and reaches the steady state by the balance of generation and disappearance rates. As the diameter of small size particles decreases, the diameter of large size particles increases more quickly by the faster coagulation with small size particles of higher concentration. As the residence time increases, the concentration and size of large size particles increase more quickly and the average charges per small size and large size particle decrease.