Chlorinated cleaning solvents have been widely used industrially, but some chlorinated cleaning solvents are considered to be prime contributors to stratospheric ozone depletion. The use of activated carbons to adsorb specific solvent vapors has thus received great attention. The adsorption equilibrium characteristics of HCFC-141b (1,1-dichloro-1-fluoroethane) and CFC-113 (1,1,2-trichloro-1,2,2-trifluoroethane) vapors on an activated carbon pellet were studied at various temperatures. Adsorption isotherms were measured and fitted by Sips equations. Detail parameters and their values for the design of adsorption facilities are suggested. The heats of adsorption for two solvents were estimated from experimental data.