The ozone kinetics (ozone auto-decomposition; effects of pH and solubility) and diesel/TCE/PCE decomposition (effects of hydroxyl radical scavenger, pH, and ozone/H2O2) by ozonation process were investigated in aqueous phase using deionized water, simulated groundwater, and actual groundwater. Reactions with deionized water and groundwater both showed the second-order reaction rates: the reaction rate was much higher in groundwater (half-life of 14.7 min) than in deionized water (half-life of 37.5 min). It was accelerated at high pH condition in both waters. The use of ozone showed high oxidation rates of TCE, PCE, and diesel. Hydroxyl radical scavengers acted as inhibitors for diesel decomposition, and high pH condition and addition of hydrogen peroxide could promote to degrade diesel in groundwater indicating ozone oxidation process could be effectively applied to treating diesel contaminated-groundwater.