In this research, in order to improve the mechanical strength and oxidation resistance of a catalyst support, we studied the formation of SiC layer on the pore surfaces of activated carbons by permeating and depositing SiC from a reaction between hydrogen and dichlorodimethylsilane (DDS). The porous structure should be kept during deposition. A fluidized bed reactor and activated carbons of size of 20-40 mesh were used. By studying characteristics of deposits under various deposition conditions, we confirmed that the best conditions of manufacturing catalyst support are a lower pressure and a lower concentration. In this work, at the conditions of 5 torr of total pressure and 3% of DDS concentration, during the 10 hr processing time, deposition occurred on the pore walls before plugging pores. The results from the mathematical modeling were compared with the experimental results.