Sulfur hexafluoride (SF6) is widely used in a variety of industrial processes and commercial products. However, this chemically stable gas is one of the most potent greenhouse gases (GHGs) contributing significantly to global warming. Therefore, to reduce greenhouse gas such as SF6, a new eco-friendly, economic, and stable treatment technology is required. In this study, the thermal decomposition characteristics of SF6 were investigated using a laboratory scale electrical tube furnace reactor and combustion-based pilot system. Based on these results, the SF6 decomposition reaction order is around 1 and its activation energy (Ea) in the investigation temperature range is 238.04-257.18 kJ/mol. This value is used to calculate the reactor size when designing a commercial facility. Also, the experimental results of a combustion-based pilot system indicate that SF6 supply location, reaction temperature, supplied concentration, and fuel/air ratio could affect SF6 decomposition efficiency. The results demonstrate that a 99.9% decomposition efficiency could be achieved in the combustion.