Issue
Korean Journal of Chemical Engineering,
Vol.37, No.10, 1810-1820, 2020
Microchip sensor of PdO-NiO electrode for H2O2 sensing fabricated with the UV photolithography
An electrochemical microchip sensor was fabricated through the photolithographic process. The metal paste used in the micro-pattern of the sensor chip contained dendritic and spherical Ag-coated Cu powders, which decreased the electrical resistance of the pattern down to 25.69Ω·cm by forming a network for electron transfer between particles. The electrode materials were dendritic palladium oxide-nickel oxide powders that showed dramatically high surface area. Also, a synergetic effect on the sensing performance between palladium oxide and nickel oxide was observed. The formation of micro-pattern was investigated through optical microscope and field-emission scanning electron microscope. The body resistance of the conductive paste was calculated using the 4-point probe technique, and the electrochemical characteristics of the sensor were analyzed by cyclic voltammetry and chronoamperometry. The fabricated sensor chip exhibited sensing performance for hydrogen peroxide detection with high sensitivity of 641.75 μA mM-1 cm-2 in a dynamic range between 50 μM and 13mM. Its long-term stability and high selectivity were also confirmed.
[References]
  1. Chen S, Yuan R, Chai Y, Hu F, Microchim. Acta, 180, 15, 2012
  2. Cinti S, Arduini F, Moscone D, Palleschi G, Killard AJ, Sensors, 14, 14222, 2014
  3. Mujeeb-U-Rahman M, Adalian D, Scherer A, J. Nanotechnology, 2015, 1, 2015
  4. Moya A, Gabriel G, Villa R, del Campo FJ, Curr. Opin. Electrochem., 3, 29, 2017
  5. Hughes G, Westmacott K, Honeychurch KC, Crew A, Pemberton RW, Hart JP, Biosensors, 6, 29, 2016
  6. Couto RAS, Lima JLFC, Quinaz MB, Talanta, 146, 801, 2016
  7. Katseli V, Economou A, Kokkinos C, Electrochem. Commun., 103, 100, 2019
  8. Kim S, Park JH, Kang K, Park CO, Park I, J. Micromech. Microeng., 25, 015002, 2015
  9. Kim CK, Lee GJ, Lee MK, Rhee CK, Powder Technol., 263, 1, 2014
  10. Hai HT, Ahn JG, Kim DJ, Lee JR, Chung HS, Kim CO, Surf. Coat. Technol., 201, 3788, 2006
  11. Nishikawa H, Mikami S, Miyake K, Aoki A, Takemoto T, Mater. Trans., 51(10), 1785, 2010
  12. Djokic SS, Djokic NS, J. Electrochem. Soc., 158(4), D204, 2011
  13. Liu J, Zeng X, J. Mater. Res., 27, 1853, 2012
  14. Zhuo K, An CY, Kannan PK, Seo N, Park YS, Chung CH, Korean J. Chem. Eng., 34(5), 1483, 2017
  15. Zhao J, Zhang D, Zhao J, J. Solid State Chem., 184, 2339, 2011
  16. Park YS, An CY, Kannan PK, Seo N, Zhuo K, Yoo TK, Chung CH, Appl. Surf. Sci., 389, 865, 2016
  17. Zhang Y, Wilson GS, J. Electroanal. Chem., 345, 253, 1993
  18. Zhang S, Han L, Hou C, Li C, Lang Q, Han L, Liu A, J. Electroanal. Chem., 742, 84, 2015
  19. Zhang T, Yuan R, Chai Y, Li W, Ling S, Sensors, 8, 5141, 2008
  20. Saha P, Maharajan A, Dikshit PK, Kim BS, Korean J. Chem. Eng., 36(12), 2143, 2019
  21. Ojani R, Raoof JB, Norouzi B, Int. J. Electrochem. Sci., 7, 1852, 2012
  22. Zhu L, Zheng Y, Jian J, Ionics, 21, 2919, 2015
  23. Lee J, Sharma D, Lim Y, Shin H, Sens. Actuators B-Chem., 267, 467, 2018
  24. Kim J, Oh SY, Park JY, Kim Y, Korean J. Chem. Eng., 33(1), 344, 2016
  25. Ah CY, Zhuo K, Kim WJ, Chung CH, Sens. Actuators B-Chem., 213, 329, 2015
  26. Smits FM, Bell Syst. Tech. J., 37(3), 711, 1958
  27. Zhang YQ, Yang WX, Wang YZ, Jia JB, Wang JG, Microchim. Acta, 180, 1085, 2013
  28. Vijayakumar S, Nagamuthu S, Muralidharan G, ACS Appl. Mater. Interfaces, 5, 2188, 2013
  29. Ren B, Fan MQ, Liu Q, Wang J, Song DL, Bai XF, Electrochim. Acta, 92, 197, 2013
  30. Chen CS, Pan FM, J. Power Sources, 208, 9, 2012
  31. Barroso-Quiroga MM, Castro-Luna AE, Int. J. Hydrog. Energy, 35(11), 6052, 2010
  32. Kurowska E, Brzozka A, Jarosz M, Sulka GD, Jaskuła M, Nanotechnology, 23, 7, 2012
  33. Zhu X, Niu X, Zhao H, Lan M, Sens. Actuators B-Chem., 195, 274, 2014
  34. Zheng J, Diao J, Jin Y, Ding A, Wang B, Wu L, Weng B, Chen J, J. Electrochem. Soc., 165, 5, 2018
  35. Stromberg LR, Hondred JA, Sanborn D, Mendivelso-Perez D, et al., Microchim. Acta, 186, 533, 2019
  36. Shi L, Layani M, Cai X, Zhao H, Magdassi S, Lan M, Sens. Actuators B-Chem., 256, 938, 2018