| Issue |
| Total 1 articles [ 키워드: Wafer Polishing ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 18 (4), pp.547-554 (2001) Preparations of Silica Slurry for Wafer Polishing via Controlled Growth of Commercial Silica Seeds So JH, Bae SH, Yang SM, et al. |
