Issue
Total 1 articles [ 키워드: Thin Film Transistor (TFT) ]
No. Article
1 Korean Journal of Chemical Engineering, 35 (6), pp.1348-1353 (2018)
Damage to amorphous indium-gallium-zinc-oxide thin film transistors under Cl2 and BCl3 plasma
Choi JH, Kim SJ, Kim HT, et al.