| Issue |
| Total 2 articles [ 키워드: Temperature Control ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 26 (2), pp.307-312 (2009) Iterative identification of temperature dynamics in single wafer rapid thermal processing Cho WH, Edgar TF, Lee JT |
| 2 |
Korean Journal of Chemical Engineering, 17 (1), pp.111-117 (2000) Design for Control: Temperature Uniformity in Rapid Thermal Processor Huang I, Liu HH, Yu CC |
