| Issue |
| Total 2 articles [ 키워드: Single-Wafer Reactor ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 19 (3), pp.391-399 (2002) Mathematical Modeling for Chemical Vapor Deposition in a Single-Wafer Reactor: Application to Low-Pressure Deposition of Tungsten Park JH |
| 2 |
Korean Journal of Chemical Engineering, 13 (2), pp.105-114 (1996) DEPOSITION UNIFORMITIES ON A WAFER AND IN A TRENCH FOR TUNGSTEN SILICIDE LPCVD IN A SINGLE-WAFER REACTOR Park JH |
