| Issue |
| Total 2 articles [ 키워드: Silicon Film ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 25 (6), pp.1539-1545 (2008) Effects of silyl concentration, hydrogen concentration, ion flux, and silyl surface diffusion length on microcrystalline silicon film growth Wen S, Zhang L, Lu J, et al. |
| 2 |
Korean Journal of Chemical Engineering, 12 (5), pp.572-575 (1995) EFFECT OF FLUORINE CHEMISTRY IN THE REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON FILMS FROM Si2H6-SiF4-H2 Kim DH, Lee IJ, Rhee SW, et al. |
