| Issue |
| Total 2 articles [ 키워드: SiO2 Film ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 16 (1), pp.12-21 (1999) NUMERICAL AMALYSIS OF LPCVD OF SiO2 FILMS FROM DIETHYLSILANE/OXYGEN Kim EJ, Kim CJ, Chung KY |
| 2 |
Korean Journal of Chemical Engineering, 15 (1), pp.56-63 (1998) MODELING OF SiO2 CVD FROM TEOS/OZONE IN A SEPARATE - GAS -INJECTION REACTOR Kim EJ, Gill WN |
