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Issue
Total 1 articles [ 키워드: SBT(SrBi2Ta2O9) ]
No. Article
1 Korean Journal of Chemical Engineering, 19 (3), pp.486-490 (2002)
Dry Etching of SrBi2Ta2O9: Comparison of Inductively Coupled Plasma Chemistries
Park JS, Kim TH, Choi CS, et al.