| Issue |
| Total 2 articles [ 키워드: Rapid Thermal Processing ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 26 (6), pp.1453-1460 (2009) Combined run-to-run and LQG control of a 12-inch RTP equipment Won W, Yun W, Ji SH, et al. |
| 2 |
Korean Journal of Chemical Engineering, 26 (2), pp.307-312 (2009) Iterative identification of temperature dynamics in single wafer rapid thermal processing Cho WH, Edgar TF, Lee JT |
