| Issue |
| Total 4 articles [ 키워드: Rapid Thermal Process ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 26 (6), pp.1453-1460 (2009) Combined run-to-run and LQG control of a 12-inch RTP equipment Won W, Yun W, Ji SH, et al. |
| 2 |
Korean Journal of Chemical Engineering, 26 (2), pp.307-312 (2009) Iterative identification of temperature dynamics in single wafer rapid thermal processing Cho WH, Edgar TF, Lee JT |
| 3 |
Korean Journal of Chemical Engineering, 23 (2), pp.171-175 (2006) Closed-loop identification of wafer temperature dynamics in a rapid thermal process Cho WH, Edgar TF, Lee JT |
| 4 |
Korean Journal of Chemical Engineering, 17 (1), pp.111-117 (2000) Design for Control: Temperature Uniformity in Rapid Thermal Processor Huang I, Liu HH, Yu CC |
