| Issue |
| Total 1 articles [ 키워드: Pulsed RF ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 22 (4), pp.639-642 (2005) Structural Properties of Amorphous Carbon Thin Films Deposited by LF (100 kHz), RF (13.56MHz), and Pulsed RF (13.56MHz) Plasma CVD Kim DS |
