| Issue |
| Total 2 articles [ 키워드: LPCVD ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 33 (9), pp.2711-2715 (2016) Effect of oxygen flow rate on the electrical and optical characteristics of dopantless tin oxide films fabricated by low pressure chemical vapor deposition Kim JH, Lee HM, Kang DW, et al. |
| 2 |
Korean Journal of Chemical Engineering, 16 (1), pp.12-21 (1999) NUMERICAL AMALYSIS OF LPCVD OF SiO2 FILMS FROM DIETHYLSILANE/OXYGEN Kim EJ, Kim CJ, Chung KY |
