| Issue |
| Total 2 articles [ 키워드: Dry Etching ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 22 (5), pp.793-796 (2005) Submicron Patterning of Ta, NiFe, and Pac-man Type Ta/NiFe/Ta Magnetic Elements Ra HW, Song KS, Hahn YB |
| 2 |
Korean Journal of Chemical Engineering, 19 (3), pp.486-490 (2002) Dry Etching of SrBi2Ta2O9: Comparison of Inductively Coupled Plasma Chemistries Park JS, Kim TH, Choi CS, et al. |
