About The Journal
  Aims and Scope
  Editorial Board
  Submit a Manuscript 
  Subscription Information
  Guidelines for Publication
  Ethics
Articles & Issues
  Search
  Issue
  Online First
  KJChE on
For Authors
  Instructions to Authors
  Ethical Responsibilities of
  Authors in KJChE
  Ethics in Publishing
  Peer Review Process
  Author's Checklist
  Copyright Transfer Form
Contact us
 
 
 
Issue
Total 1 articles [ 키워드: Diethylsilane ]
No. Article
1 Korean Journal of Chemical Engineering, 16 (1), pp.12-21 (1999)
NUMERICAL AMALYSIS OF LPCVD OF SiO2 FILMS FROM DIETHYLSILANE/OXYGEN
Kim EJ, Kim CJ, Chung KY