| Issue |
| Total 1 articles [ 키워드: CoFeB ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 31 (12), pp.2274-2279 (2014) Etch characteristics of CoFeB thin films and magnetic tunnel junction stacks in a H2O/CH3OH plasma Hwang SM, Garay A, Lee IH, et al. |
