Issue
Total 1 articles [ 키워드: C7H3F3 and SiH4 ]
No. Article
1 Korean Journal of Chemical Engineering, 17 (2), pp.149-155 (2000)
The Permeability Characteristics of Non-Porus Membrane by C7H3F3/SiH4 Plasma Polymeric Membrane
Kim KS, Jung IH