Issue
Total 2 articles [ 키워드: Atomic Layer Deposition (ALD) ]
No. Article
1 Korean Journal of Chemical Engineering, 34 (3), pp.892-897 (2017)
Organic/inorganic multilayer thin film encapsulation via initiated chemical vapor deposition and atomic layer deposition for its application to organic solar cells
Kim BJ, Han D, Yoo S, et al.
2 Korean Journal of Chemical Engineering, 29 (7), pp.969-973 (2012)
Atomic layer deposition of TiO2 from tetrakis-dimethylamido-titanium and ozone
Kim YW, Kim DH