| Issue |
| Total 1 articles [ 저자: Pearton SJ ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 17 (3), pp.304-309 (2000) A Unified Global Self-Consistent Model of a Capacitively and Inductively Coupled Plasma Etching System Hahn YB, Pearton SJ |
| Print: | ISSN 0256-1115 |
| Online: | ISSN 1975-7220 |
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