Issue
Total 2 articles [ 저자: Cho WH ]
No. Article
1 Korean Journal of Chemical Engineering, 26 (2), pp.307-312 (2009)
Iterative identification of temperature dynamics in single wafer rapid thermal processing
Cho WH, Edgar TF, Lee JT
2 Korean Journal of Chemical Engineering, 23 (2), pp.171-175 (2006)
Closed-loop identification of wafer temperature dynamics in a rapid thermal process
Cho WH, Edgar TF, Lee JT