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- Conflict of Interest
- In relation to this article, we declare that there is no conflict of interest.
- Publication history
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Received July 1, 2025
Accepted July 14, 2025
Available online November 25, 2025
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This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
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Thermally Enhanced Supercapacitive Performance of ALD‑Grown TiO2 Thin Film on Phosphorus‑Doped MnO2 as a Positive Electrode
https://doi.org/10.1007/s11814-025-00520-2
Abstract
In this work, to improve the performance of P-doped MnO2
(designated PMO) electrodes as a supercapacitor, TiO2
was
deposited on a PMO (designated PMO@TiO2) electrode and annealed at various temperatures. Through this surface engineering,
using atomic layer deposition (ALD), an ultrathin film of 5 nm TiO2
deposited over the PMO electrode acts as
an active layer that enhances both the electrochemical performance and the stability of the core electrode. In addition, the
thermal treatment of TiO2
deposited on a PMO electrode enhanced the crystallinity of TiO2
with anatase phase and improved
its electrical conductivity and cyclic stability. These results lead to such a significant improvement in the specific capacitance
from 1828 to 2817 F/g with a decrease in charge transfer resistance (
Rct) and an increase in active sites at the PMO@
TiO2 electrode annealed at 500 ℃ (designated PMO@TiO2(500)) compared to the PMO electrode from GCD profiles and
coulombic efficiency. Moreover, cyclic stability of the PMO@TiO2(500) electrode improved capacity retention from 69.8
to 86.4% at 3000 cycles. Therefore, it is suitable for a positive electrode, which has high capacitance, low Rct,
low cost, and
high-water decomposition overvoltage for supercapacitor.
