A two-dimensional fluid modeling was performed for the analysis of the high-density plasma source. The model coupled plasma transport, neutral species dynamics, gas flow, heat transfer, and plasma power coupling from an external source. The governing equations for multicomponent transport system were solved along with Maxwell's equations for inductively coupled power deposition. The model was applied to a chlorine discharge in the plasma source chamber of helical resonator. The effects of reactor pressure, gas flow rate, and deposited power on the plasma density and the electron temperature were examined.