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Search / Korean Journal of Chemical Engineering
Total 2 articles [ 키워드: High-Density Plasma ]
No. Article
1 Korean Chemical Engineering Research, 59 (2), pp.254-259 (2021)
고밀도 C4F8 플라즈마에서 증착된 불화탄소막의 광학적 및 전기적 특성
Optical and Electrical Characteristics of Fluorocarbon Films Deposited in a High-Density C4F8 Plasma
권혁규, 유상현, 김준현, et al.
2 HWAHAK KONGHAK, 39 (1), pp.23-29 (2001)
고밀도 플라즈마 발생장치 2차원 모델링
Two-Dimensional Modeling of High-Density Plasma Source
이상덕, 신치범, Berezhnoj S