Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Search / Korean Journal of Chemical Engineering
Total
1
articles [
키워드
:
Post-etch residue
]
No.
Article
1
Korean Chemical Engineering Research
,
54
(4), pp.548-554 (2016)
산화구리 잔유물 제거를 위한 카르복시산 함유 반수계 용액의 세정특성
Characteristics of Semi-Aqueous Cleaning Solution with Carboxylic Acid for the Removal of Copper Oxides Residues
고천광, 이원규
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