태양전지 기판의 원료인 폴리실리콘의 공급부족은 태양광발전산업의 비약적인 발전에 있어 최대 걸림돌이 되고 있다. 태양전지 제조에 충분한 순도로 폴리실리콘을 값싸게 제조할 수 있게 하는 공정기술의 개발은 태양광발전의 가격 경쟁력과 활용범위를 크게 증가시키는 중요한 계기가 될 수 있다. 본 총설에서는 태양전지용 폴리실리콘 제조를 위해 현재 이용 가능한 기술들을 정리해보고, 최근에 주목받고 있는 유동층 석출공정기술과 관련하여 응용범위 확대를 가로막고 있는 주요 기술적 장애요인에 대하여 중점적으로 소개하고자 한다.
Recent rapid progress in the photovoltaic industry has seriously been retarded by limited supply of polysilicon used as the feedstock for silicon wafer-based solar cells. It is thus believed that development of a competitive process for preparing polysilicon with the quality required for solar cells can greatly enhance the competitiveness and extent of the photovoltaic application. Technologies currently available for preparing the silicon feedstock are reviewed with the recent fluidized bed silicon deposition process being discussed in more details in terms of key technical barriers.
Rogol M, SOLA ANNUAL 2007-Big Things in a Small Package, Photon Consulting, Solar Verlag GmbH, 2007
Jaeger-Waldau A, EUR-22346 EN, European Commission, DG Joint Research Center, August, 2006
Mueller A, Ghosh M, Sonnenshein R, Woditsch P, Mater. Sci. Eng. B-Solid State Mater. Adv. Technol., 134, 257, 2006
Tsuo YS, Gee JM, Menna P, Strebkov DS, Pinov A, Zadde V, the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Wien, Austria, July 6-10, 1998
Rull G, Micronews, 61, 4-6, September, 2007
Flynn H, Bradford T, POLYSILICON-Supply, Demand and Implications for the PV Industry, Prometheus Institute fir Sustainable Development, 2006
Ceccaroli B, Lohne O, in Luque, A. and Hegedus, S. (Eds), Handbook of Photovoltaic Science and Engineering, John Wiley & Sons Ltd., Chichester, England, 154-204, 2003
Rogol M, 3rd Solar Silicon Conference, Apr. 3, Munich, 2006
Tremblay JF, Chem. Eng. News, 84(40), 30, 2006
Kuramoto M, Chem. Eng. (Japan), 55(11), 86, 1991
Fath P, Mozer A, 3rd Solar Silicon Conference, Apr. 3, Munich, 2006
Woditsch P, PV-Industrieforum 2006, June 21(2006)[http:// www.renewable-energy-world.com/articles/article_display.cfm? ARTICLE_ID=273237&p=121]
O’Mara WC, Herring RB, Hunt LP, Et AL, Handbook of Semiconductor Silicon Technology, Noyes Publications, NJ, USA, 1990
Araki I, Yamamoto T, Tokuda Y, Momose H, 197-200, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21, 2002
Andersen GJ, Hoel JO, Roe T, Oye HA, Rong HM, 163-176, in Oye, H. A., Holas, A. and Nygaard, L. (Eds), Silicon for the Chemical Industry VII, MS Trollfyord, Tromso-Bergen, Norway, Sept. 21-24, 2004
Andersen GJ, Hoel JO, Rong HM, Roe T, WO 2007/035108 A1, 2007
Kuerschner U, Paetzold U, Hesse K, Lieske H, 177-188, in Oye, H. A., Holas, A. and Nygaard, L. (Eds), Silicon for the Chemical Industry VII, MS Trollfyord, Tromso-Bergen, Norway, Sept. 21-24, 2004
Kotzsch HJ, Vahlensieck HJ, US Patent No. 4,044,109, 1977
Sakata K, Hirota K, US Patent No. 5,871,705, 1999
Wineland JD, 183-189, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21, 2002
Braunsperger J, Lang W, Zainer T, US Patent No. 4,130,632, 1978
Blocher JM, Browning MF, US Patent No. 4,117,094, 1978
Kroupa MG, 201-208, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21, 2002
Union Carbide Corp., “Low Cost Solar Array Project-Feasibility of the Silane Process for Producing Semiconductor-Grade Silicon,” JPL contract No. 954334, Final Report, June, 1979
Mui JYP, Seyferth D, JPL Contract No. 955 382, Final Report, April 15, 1981
Sundermeyer W, 265-270, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G., and Tuset, J.K. (Eds), Silicon for the Chemical Industry V, Tromsoe, Norway, May 29-June 2, 2000
Padovani FA, Miller MB, Moore JA, Fowler JH, June MN, Mattews JD, Morton TR, Stotko NA, Palmer LB, US Patent No. 4,092,446, 1978
Weigert W, US Patent No. 4,165,363, 1979
Weigert W, US Patent No. 4,217,334, 1980
Roever I, Acker J, Bohmhammel K, Roewer G, Hesse K, Paetzold U, 209-224, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21, 2002
Roewer G, Paetzold U, Walter H, US Patent No. 5,716,590, 1998
Sarma KR, Rice MJ, US Patent No. 4,309,259, 1982
Ingle WM, Preffley MS, Setty HSN, US Patent No.4,526,769, 1985
Hamster H, Koeppl F, US Patent No. 4,536,642, 1985
Bakay CJ, US Patent No. 3,968,199, 1976
Litteral CJ, US Patent No. 4,113,845, 1978
Breneman WC, US Patent No. 4,676,967, 1987
Jung IN, Cho KD, Lim JC, Yoo BR, US Patent No. 4,701,430, 1987
Block HD, Mleczko L, Bulan A, Weber R, Buchholz S, Sill T, US Patent No. 6,852,301, 2005
Keck DW, Nagai K, Yatsurugi Y, Morihara H, Izawa J, US Patent Nos. 5,382,419 and 5,478,396(1995) and 5,545,387, 1996
Weidhaus D, Hayduk A, US Patent No. 7,029,632, 2006
Wacker Chemie AG FACT BOOK 2007, Investor Relations, July, 2007
Solarbuzz News, “Wacker Builds Granular Solar Polysilicon Plant,” July 16(2007); http://www.solarbuzz.com/News/NewsEUMA175.htm.
Weidhaus D, Schindlbeck E, Hesse K, Silicon for the Chemical Industry VII, MS Trollfyord, Tromso-Bergen, Norway, Sept. 21-24, 2004
Weidhaus D, Crossmann I, Schreieder F, US Patent Application Publication No. 0135986, 2005
Weidhaus D, Schindlbeck E, Hesse K, Domberger E, 20th European Photovoltaic Solar Energy Conference, Proceedings 623-626, June 6-10, Barcelona, Spain, 2005
Kim HY, US Patent No. 6,395,248, 2002
Kim HY, Park YK, US Patent No. 6,541,377, 2003
Kim HY, Yoon KK, Park YK, Choi WC, Korea Patent 10-0961284, 2007
Kim HY, Yoon KK, Park YK, Choi WC, Korea Patent 10-0756310, 2007
Kim HY, Yoon KK, Park YK, Choi WC, Kim HK, Proceedings, 256-263, GreenSarang Workshop, COEX, Seoul, Oct. 5, 2007
Age S, US Patent 5,077,028, 1991
Schreieder F, Kim HY, US Patent 6,007,869, 1999
Hunt LP, Sirtl E, J. Electrochem. Soc.: Solid-State Sci. & Tech., 119(12), 1741, 1972
Lund CP, Zhang W, Jennings PJ, Singh P, 249-263, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G., and Tuset, J. K. (Eds), Silicon for the Chemical Industry V, Tromsoe, Norway, May 29-June 2, 2000
REC Group, “Analyst Silicon Field Trip,” March 28, 2007
Block HD, Wagner G, 271-280, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G., and Tuset, J. K. (Eds), Silicon for the Chemical Industry V, Tromsoe, Norway, May 29-June 2, 2000
DeLuca JP, US Patent No. 5,910,295, 1999
Hsu G, Hogle R, Rohatgi N, Morrison A, J. Electrochem. Soc.: Solid-State Sci. & Tech., 131(3), 660, 1984
Gautreaux MF, Lawrence WW, Daniels GA, Hughmark GA, US Patent No. 4,981,102, 1991
Clary DW, Wikman AO, US Patent No. 5,260,538, 1993
Lord SM, Milligan RJ, US Patent No. 5,798,137, 1998
Lord SM, Milligan RJ, US Patent No. 5,810,934, 1998
Koenig T, Pfaffelhuber M, Herold H, Holdenried G, Mleczko L, US Patent No. 6,849,244, 2005
Mueller A, Sonnenschein R, Sill T, Goelz A, Adler P, 20th European Photovoltaic Solar Energy Conference, Proceedings 623-626, June 6-10, Barcelona, Spain, 2005
Geerligs B, 3rd Solar Silicon Conference, Munich, April 3, 2006
Nepomnyaschikh AI, Fedosenko VA, Eremin VP, Krasin BA, 17-21, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21, 2002
Dehloff C, 3rd Solar Silicon Conference, Munich, April 3, 2006