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Issue
Total 1 articles [ 키워드: Silicon Oxide ]
No. Article
1 Korean Chemical Engineering Research, 46 (2), pp.408-413 (2008)
저압급속열산화법과 플라즈마확산산화법에 의한 실리콘 산화박막의 제조
Fabrication of Ultrathin Silicon Oxide Layer by Low Pressure Rapid Thermal Oxidation and Remote Plasma Oxidation
고천광, 이원규