Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
키워드
:
SiCN
]
No.
Article
1
Korean Chemical Engineering Research
,
42
(4), pp.447-450 (2004)
플라즈마 화학증착법에 의한 질화탄소규소 박막의 성장과 Si 나노점 형성
Formation of Si Nano Dots and Silicon Carbon Nitride Films by Plasma Enhanced Chemical Vapor Deposition
홍주형, 김상훈, 한윤봉
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