Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
키워드
:
Plasma Enhanced Atomic Layer Deposition
]
No.
Article
1
Korean Chemical Engineering Research
,
49
(3), pp.357-360 (2011)
플라즈마 원자층 증착 방법을 이용한 N-doped ZnO 나노박막의 구조적·광학적·전기적 특성
Structural, Optical and Electrical Properties of N-doped ZnO Nanofilms by Plasma Enhanced Atomic Layer Deposition
김진환, 양완연, 한윤봉
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