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Issue
Total 1 articles [ 키워드: PECVD SiO2 ]
No. Article
1 Korean Chemical Engineering Research, 46 (2), pp.389-396 (2008)
고온 열순환 공정이 BCB와 PECVD 산화규소막 계면의 본딩 결합력에 미치는 영향에 대한 연구
A Study on the Effects of High Temperature Thermal Cycling on Bond Strength at the Interface between BCB and PECVD SiO2 Layers
권용재, 석종원, Lu JQ, et al.