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Issue
Total 1 articles [ 키워드: Nano-Dots ]
No. Article
1 Korean Chemical Engineering Research, 42 (4), pp.447-450 (2004)
플라즈마 화학증착법에 의한 질화탄소규소 박막의 성장과 Si 나노점 형성
Formation of Si Nano Dots and Silicon Carbon Nitride Films by Plasma Enhanced Chemical Vapor Deposition
홍주형, 김상훈, 한윤봉