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Issue
Total 1 articles [ 키워드: Magnetic Materials ]
No. Article
1 Korean Chemical Engineering Research, 43 (1), pp.76-79 (2005)
Cl2/Ar 유도 결합 플라즈마를 이용한 NiFe, NiFeCo, Ta의 건식식각
Dry Etching of NiFe, NiFeCo, and Ta in Cl2/Ar Inductively Coupled Plasma
라현욱, 박형조, 김기주, et al.