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Issue
Total 1 articles [ 키워드: MEMS Fabrication ]
No. Article
1 Korean Chemical Engineering Research, 44 (5), pp.513-519 (2006)
마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작
MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis
김태하, 김다영, 전명석, et al.