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Issue
Total 2 articles [ 키워드: Inductively Coupled Plasma ]
No. Article
1 Korean Chemical Engineering Research, 48 (3), pp.355-358 (2010)
유도 결합형 저온 플라즈마 처리에 따른 폴리카보네이트 표면 특성 변화
Influence of Inductively Coupled Plasma on Surface Properties of Polycarbonate
원동수, 이원규
2 Korean Chemical Engineering Research, 43 (4), pp.531-536 (2005)
고밀도 플라즈마 식각에 의한 CoTb과 CoZrNb 박막의 식각 특성
Etch Characteristics of CoTb and CoZrNb Thin Films by High Density Plasma Etching
신별, 박익현, 정지원