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Issue
Total 1 articles [ 키워드: Czochralski process ]
No. Article
1 Korean Chemical Engineering Research, 58 (3), pp.369-380 (2020)
Pulling rate, rotation speed 및 melt charge level 최적화에 의한 쵸크랄스키 공정 실리콘 단결정의 O2 불순물 최소화 설계
A Czochralski Process Design for Si-single Crystal O2 Impurity Minimization with Pulling Rate, Rotation Speed and Melt Charge Level Optimization
전혜준, 박주홍, 블라디미르 아르테미예프, et al.