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Issue
Total 1 articles [ 키워드: Ar Addition ]
No. Article
1 Korean Chemical Engineering Research, 51 (6), pp.755-759 (2013)
Bosch 공정에서 Si 식각속도와 식각프로파일에 대한 Ar 첨가의 영향
Effects of Ar Addition on the Etch Rates and Etch Profiles of Si Substrates During the Bosch Process
지정민, 조성운, 김창구