Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
About The Journal
Aims and Scope
Editorial Board
Submit a Manuscript
Subscription Information
Articles & Issues
Issue
Search
For Authors
Instructions to Authors
Ethics in Publishing
Peer Review Process
Author's Checklist
Copyright Transfer Form
Contact us
Issue
Total
1
articles [
저자
:
지정민
]
No.
Article
1
Korean Chemical Engineering Research
,
51
(6), pp.755-759 (2013)
Bosch 공정에서 Si 식각속도와 식각프로파일에 대한 Ar 첨가의 영향
Effects of Ar Addition on the Etch Rates and Etch Profiles of Si Substrates During the Bosch Process
지정민
, 조성운, 김창구
Search