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Issue
Total 1 articles [ 저자: 이건호 ]
No. Article
1 Korean Chemical Engineering Research, 45 (2), pp.203-207 (2007)
불산-오존-희석 암모니아수 세정에 의한 실리콘 웨이퍼 표면의 미세입자 제거
Particle Removal on Silicon Wafer Surface by Ozone-HF-NH4OH Sequence
이건호, 배소익