Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Issue
Total
1
articles [
저자
:
유상현
]
No.
Article
1
Korean Chemical Engineering Research
,
59
(2), pp.254-259 (2021)
고밀도 C4F8 플라즈마에서 증착된 불화탄소막의 광학적 및 전기적 특성
Optical and Electrical Characteristics of Fluorocarbon Films Deposited in a High-Density C4F8 Plasma
권혁규,
유상현
, 김준현, et al.
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