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Issue
Total 1 articles [ 저자: 박영배 ]
No. Article
1 HWAHAK KONGHAK, 34 (2), pp.143-148 (1996)
원거리 플라즈마 화학증착을 이용한 저온 이산화규소박막의 제조
Remote Plasma Chemical Vapor Deposition(RPCVD) of Low Temperature Silicon Oxide
박영배, 강진규, 이시우