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| Total 2 articles [ 저자: 라현욱 ] |
| No. |
Article |
| 1 |
Korean Chemical Engineering Research, 43 (1), pp.76-79 (2005)
Cl2/Ar 유도 결합 플라즈마를 이용한 NiFe, NiFeCo, Ta의 건식식각
Dry Etching of NiFe, NiFeCo, and Ta in Cl2/Ar Inductively Coupled Plasma
라현욱, 박형조, 김기주, et al. |
| 2 |
Korean Chemical Engineering Research, 42 (6), pp.712-715 (2004)
Hard Mask 용 SiO2의 NF3/Ar ICP 식각특성과 실험계획법과의 비교
Dry Etching of SiO2 Hard Mask in NF3/Ar Inductively Coupled Plasmas and Comparison with Design of Experiments
박형조, 라현욱, 남기석, et al. |
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