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Issue
Total 1 articles [ 저자: 김진혁 ]
No. Article
1 Korean Chemical Engineering Research, 43 (1), pp.98-102 (2005)
CVD법에 의해 성막된 구리의 표면 형상 및 충진 특성에 관한 연구
Surface Morphology and Hole Filling Characteristics of CVD Copper
김덕수, 선우창신, 박돈희, et al.